Conference "High-k oxides by ALD"

Hotel Jasek Premium, Wrocław, Poland, March 7th - 10th, 2018

About the conference

In collaboration with the EU COST networking project HerALD, Institute of Physics, Polish Academy of Sciences, NaMLab and Polish Vacuum Society invite you to the next edition of the conference "High-k oxides by ALD", which will be held in Wroclaw, Poland, on March 7-10, 2018. New challenges offered by the application of ALD based high-k dielectric materials in nanotechnology will be discussed by more than 80 participants from industry, research institutes and universities.

The conference is continuation of NaMLab workshops - a stimulating European platform for application-oriented scientists to exchange ideas and discuss latest experimental results on process technology, new results in the field of ALD-grown dielectrics for solar cells, transparent conduction oxides (TCOs), and for silicon based micro- and nano-electronics. The 2018 edition is organized in Poland to increase integration between Eastern and Western Europe countries.

Two forms of presentations are planned (poster and oral). All accepted oral presentations will be treated as Invited talks
(20 minutes including discussion).

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